JPH031965U - - Google Patents
Info
- Publication number
- JPH031965U JPH031965U JP6168289U JP6168289U JPH031965U JP H031965 U JPH031965 U JP H031965U JP 6168289 U JP6168289 U JP 6168289U JP 6168289 U JP6168289 U JP 6168289U JP H031965 U JPH031965 U JP H031965U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- plasma etching
- porous
- upper electrode
- etching apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001020 plasma etching Methods 0.000 claims description 10
- 230000035699 permeability Effects 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000011148 porous material Substances 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6168289U JPH031965U (en]) | 1989-05-26 | 1989-05-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6168289U JPH031965U (en]) | 1989-05-26 | 1989-05-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH031965U true JPH031965U (en]) | 1991-01-10 |
Family
ID=31590148
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6168289U Pending JPH031965U (en]) | 1989-05-26 | 1989-05-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH031965U (en]) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62210623A (ja) * | 1986-03-11 | 1987-09-16 | Hitachi Electronics Eng Co Ltd | 気相反応装置用電極 |
-
1989
- 1989-05-26 JP JP6168289U patent/JPH031965U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62210623A (ja) * | 1986-03-11 | 1987-09-16 | Hitachi Electronics Eng Co Ltd | 気相反応装置用電極 |